Semiconductor Manufacturing Process
Semiconductors are the key evolving components in the industry today. HORIBA has kept its sights keenly focused on this micro world. Specialists in each field; HORIBA have pursued proprietary engineering projects in a wide range of areas that include evaluation and analysis, purity of ultra-pure water, composition of liquids and gases, and more broadly, environment and safety. With our sights set clearly on the overall process, we have developed a line-up of analytical equipment, fluid control and measuring systems tailored to every stage of the semiconductor manufacturing process in response to stringent quality control requirements. In all stages, from materials evaluation through to final inspection, HORIBA products help maintain high efficiency in the manufacture of leading-edge electronics devices.
Featured Application
Non contact temperature measurement for:
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Related Products
Below you can see the different stages during the Semiconductor Manufacturing Process. Please click on each phase in order to see the products that are avaialble to you during this stage.
Material Analysis
Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.
The application of photoluminescence for the quality...
Lithography Process
High speed and high accuracy inspection for blanks mask
Achieves dramatic cost reductions in advanced mask inspections
Low running costs thanks to a compact design, plus remarkable versatility
For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.
DI Water Analysis
Resistivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm
Measure the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb).
Material Analysis (Particulates Analysis & Defect Analysis)
The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.
High spectral resolution analytical Raman microscope for ultimate performance and flexibility; includes UV Raman configuration, full automation and wide range of accessories.
Single point analysis and automated hyperspectral imaging.
Dual vacuum modes.
Spot sizes from 1.2 mm to 10 µm.
Redirecting to Chemical Concentration Monitors Page
Fluid Control
Gas Concentration Monitoring
High senility in-line gas monitor of SiF4 and CF4 for chamber cleaning end point monitoring in deposition process. Reduce clean time and gas usage by real-time monitoring.
In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.
Process Gas Monitoring
Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.
Thin Film Analysis/Control
The ultimate solution to every challenge in thin film measurement
CMP Process
The LA-960V2 uses Mie Scattering (laser diffraction) to measure particle size of suspensions or dry powders. The speed and ease-of-use of this technique makes it the popular choice for most applications.
Drain Water Analysis
The IF-250 Simple Fluoride Ion Monitor for use in industry provides continuous measurements of the free fluoride ion concentration in waste water and other test samples using the fluoride ion electrode method.
The unit can be used on a range of test samples with varying concentrations from 0.0 to 10.0 mg / L up to 0 to 10,000 mg / L. This makes the IF-250 the ideal unit for monitoring the treatment of waste water and effluent resulting from the semiconductor production process, as well as electronic and glass factories using fluoride in the production process.
Non-Contact Temperature Measurement
The IT-470F-H is a built-in type, non-contact infrared thermometer with industry-leading accuracy. It contributes to improve process stabilization, for which requires high accuracy temperature measurement, such as semiconductor...